5N BF3 Electronic Grade Boron Trifluoride Gas, boasting 99.999% purity, is vital for producing high purity diborane in the chip industry. Its ultra-high purity minimizes impurities, ensuring superior quality and performance in semiconductor fabrication. This premium gas is indispensable for cutting-edge electronic manufacturing and innovation.
| Parameter | Unit | High-purity grade Specification | Measured value |
| BF3 Purity | % | ≧99.99 | 99.995 |
| Oxygen(02) | ppm | ≤ 5.0 | 2.1 |
| Nitrogen (N2) | ppm | ≤ 40.0 | 3 |
| Carbon dioxide (CO2) | ppm | ≤10.0 | 1.4 |
| Carbon Monoxide (CO) | ppm | ≤25.0 | 2.1 |
| Sulfur Dioxide (SO2) | ppm | ≤10.0 | 1.8 |
| Methane(CH4) | ppm | ≤2.0 | 0.4 |
| Silicon tetrafluoride (SiF4) | ppm | ≤4.0 | 0.1 |
| Sulfate | ppm | ≤4.0 | 0.1 |
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